Исследование структуры, элементного и фазового состава покрытий на основе оксинитридов титана осажденных методом реактивного магнетронного распыления = The structure, elemental and phase composition of the coating of titanium oxynitride deposited by reactive magnetron sputtering / Е. С. Киселева [и др.]
Set Level: Взаимодействие ионов с поверхностью (ВИП - 2013), труды XXI международной конференции, Ярославль, Россия, 22-26 августа 2013 г., Ion - surface interactions (ISI - 2013) / под ред. Е. Ю. Зыковой [и др.], [Б. и.] = 2013Language: русский.Country: Россия.Abstract: In the paper, we investigate the structure, elemental and phase composition Ti-O/Ti-Ncoatings that were deposited by reactive magnetron sputtering on a stainless steel surface. Thefilm consists of two phases: a nanocrystalline and amorphous structure, the strength of theinterfaces increases the resistance to deformation of the coating, and the absence of dislocationsinside the crystallites increases their elasticity. At saturation in the plasma on the surface of thefilms formed oxy-hydrides..Bibliography: [Библиогр.: с. 153 (2 назв.)].Subject: электронный ресурс | труды учёных ТПУ | покрытия | оксинитридные покрытия | оксинитриды титана | реактивное магнетронное распыление Online Resources:Click here to access online | Click here to access onlineЗаглавие с экрана
[Библиогр.: с. 153 (2 назв.)]
In the paper, we investigate the structure, elemental and phase composition Ti-O/Ti-Ncoatings that were deposited by reactive magnetron sputtering on a stainless steel surface. Thefilm consists of two phases: a nanocrystalline and amorphous structure, the strength of theinterfaces increases the resistance to deformation of the coating, and the absence of dislocationsinside the crystallites increases their elasticity. At saturation in the plasma on the surface of thefilms formed oxy-hydrides.
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